Biological testing device

ABSTRACT

A biological testing device includes a device body including an ultrasonic wave transmitting/receiving part, and a mounting member for mounting the device body on a tested object. The ultrasonic wave transmitting/receiving part includes a sensor array substrate including ultrasonic transducers, first and second resin material parts, and an ultrasonic wave transmitting medium. The first resin material part forms a first space closed off from an outside space between the first resin material part and the sensor array substrate with the first resin material part facing the ultrasonic transducers. The second resin material part forms a second space communicating with the first space. The second space is closed off from the outside space, at least a portion of the second resin material part including a flexible portion configured and arranged to bulge toward the outside space. The ultrasonic wave transmitting medium fills the first space and the second space.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation application of U.S. patentapplication Ser. No. 13/049,221 filed on Mar. 16, 2011. This applicationclaims priority to Japanese Patent Application No. 2010-063902 filed onMar. 19, 2010, and Japanese Patent Application No. 2010-287179 filed onDec. 24, 2010. The entire disclosures of U.S. patent application Ser.No. 13/049,221 and Japanese Patent Application Nos. 2010-063902 and2010-287179 are hereby incorporated herein by reference.

BACKGROUND

1. Technical Field

The present invention relates to a biological testing device includingan ultrasonic sensor, and more specifically to an ultrasonic sensor forsending and receiving ultrasonic waves in the human body.

2. Related Art

As is well known, ultrasonic sensors determine the position andcondition of a test object using ultrasonic transducers that send andreceive ultrasonic waves (e.g., see Japanese Laid-open PatentPublication No. 2009-25179).

A liquid detecting unit (ultrasonic sensor) disclosed in JapaneseLaid-open Patent Publication No. 2009-25179 includes an ultrasonicoutput unit having an ultrasonic transducer, and an acoustic impedancematching layer disposed on the ultrasonic output unit. In the liquiddetecting unit, an ultrasonic transceiving face is formed on one side ofthe ultrasonic output unit. Also, the acoustic impedance matching layeris formed on one side of the ultrasonic output unit. An output face foroutputting ultrasonic waves is formed in the side opposite the side incontact with the ultrasonic output unit. A fluid binder holding recessis formed in the output face. When the output face of the liquiddetecting unit is brought into contact with a container, the fluidbinder holding recess is filled with a fluid binder as the output faceis brought into contact with the container.

A tube-shaped recess-forming member is disposed on one side of theultrasonic output unit, and the interior of the recess-forming member isfilled with an acoustic impedance layer to form a fluid binder holdingrecess. When the output face is brought into contact with a container,the fluid binder holding recess is filled with fluid binder.

SUMMARY

When a physical condition is detected using the ultrasonic transducer,the output face of the liquid unit described in Japanese Laid-openPatent Publication No. 2009-25179 is brought into contact with a body,and ultrasonic waves are sent and received. In order to detect thephysical condition properly, the output face is preferably brought closeto the body.

However, in Japanese Laid-open Patent Publication No. 2009-25179described above, a fluid binder holding recess is formed in the outputface. This fluid binder holding recess is filled with a fluid binder,and brought into contact with the body. When fluid binder flows out ofthe fluid binder holding recess under these conditions, it can makecontact with the body and the output face. Also, bubbles can formbetween the body and the output face. The ultrasonic waves are reflectedby the bubbles, and the detection process cannot be performed properly.A configuration in which the output face is flat and free of a recesshas been considered. Here, the output face is pressed against the body.However, while the body and the output face come into contact, internaldeflection occurs on the output face, and the ultrasonic transceivingface of the ultrasonic transducer disposed adjacent to the acousticimpedance layer is also deformed.

A configuration has also been considered in which a tube-shapedrecess-forming member is formed on the side of the ultrasonic outputunit in which the ultrasonic transceiving face is disposed. Here, theoutput face is formed in the end portion of the recess-forming member,and the interior of the recess-forming member is sealed. Also, theacoustic impedance layer for the liquid is disposed on the inside of thesealed recess-forming member. However, when the output face is broughtinto contact with a body, the deflection of the output face increasesthe internal pressure on the acoustic impedance layer of the liquid, andthe internal pressure deforms the acoustic transceiving face.

When the acoustic transducer is deformed in this way, the amount ofdisplacement of the ultrasonic transceiving face by the vibration isreduced, and ultrasonic waves cannot be sent and received properly.

An object of the present invention is to provide a biological testingdevice including an ultrasonic sensor able to send and receiveultrasonic waves properly.

A biological testing device according to a first aspect of the presentinvention includes a device body including an ultrasonic wavetransmitting/receiving part, and a mounting member configured andarranged to mount the device body on a tested object. The ultrasonicwave transmitting/receiving part includes a sensor array substrate, afirst resin material part, a second resin material part, and anultrasonic wave transmitting medium. The sensor array substrate includesa plurality of ultrasonic transducers arranged thereon. The first resinmaterial part forms a first space closed off from an outside spacebetween the first resin material part and the sensor array substratewith the first resin material part facing the ultrasonic transducers.The second resin material part forms a second space communicating withthe first space. The second space is closed off from the outside space,at least a portion of the second resin material part including aflexible portion configured and arranged to bulge toward the outsidespace. The ultrasonic wave transmitting medium fills the first space andthe second space.

In the first aspect, the first space is formed at least between thefirst resin material part and the sensor array substrate, and the firstspace is filled with an ultrasonic wave transmitting medium. Thisultrasonic wave transmitting medium can be water or saline, whicheffectively transmit ultrasonic waves. This medium can properly transmitultrasonic waves without attenuation. Also, a contacting portion isprovided in the region of the first resin material part opposite theopening. By bringing the test object into contact with the contactingportion, the ultrasonic waves generated by the vibrating support filmcan be transmitted to the test object, and the ultrasonic wavesreflected by the test object can be transmitted to the support film.

Here, as mentioned above, when the test object is brought into contactwith the contacting portion of the first resin material part, thecontacting portion experiences deflection, and the pressure inside thefirst space increases. However, in the present invention, a second spacecommunicating with the first space is provided by a second resinmaterial part, and a flexible portion that is configured and arranged tobulge toward the outside space is disposed in the second resin materialpart. Thus, when the pressure inside the first space increases, theflexible portion bulges towards the outside space, and the ultrasonicwave transmitting medium inside the first space flows into the secondspace.

Therefore, even when the test object is brought into contact with thecontacting portion, and the pressure inside the first space increases,deformation of the support film can be restrained. In other words, whenvoltage is applied to a piezoelectric body, and the support film isvibrated, or when ultrasonic waves are received by the support film andvibrated, the vibration of the support film is not attenuated, andultrasonic waves are sent and received properly.

In the biological testing device as described above, preferably, thesensor array substrate includes a plurality of openings, and each of theultrasonic transducers includes a support film that covers one side ofthe sensor array substrate and a piezoelectric body disposed on an innerregion of the corresponding one of the openings in a plan view seen in athickness direction of the support film, the piezoelectric body beingformed by laminating a lower electrode, a piezoelectric film, and anupper electrode in this order on the support film. Moreover, the firstresin material part preferably has a first recessed portion openingtowards the support film with the first space being formed by connectingan open end of the first recessed portion to the support film, thesecond resin material part preferably has a second recessed portionopening towards the support film with the second space being formed byconnecting an open end of the second recessed portion to the supportfilm, and the first resin material part and the second resin materialpart are integrally formed.

Because the first resin material part and the second resin material partare integrally formed in this aspect, the same resin material can beused, and manufacturing costs can be decreased. Also, the first spaceand the second space can be easily formed when the first recess in thefirst resin material part and the open end of the second recess in thesecond resin material part are closed off by the support film. As aresult, the manufacturing process can be simplified.

In the biological testing device as described above, preferably, theopening in the sensor array substrate passes through the sensor arraysubstrate in the thickness direction, the support film covers one sideof the sensor array substrate, the first resin material part has a firstrecessed portion opening towards the support film with the first spacebeing formed by connecting an open end of the first recessed portion toanother side of the sensor array substrate opposite from the one side,and the second resin material part has a second recessed portion openingtowards the support film with the second space being formed byconnecting an open end of the second recessed portion to the anotherside of the sensor array substrate.

However, when the open ends of the recesses are connected to the supportfilm covering one side of the sensor array substrate, and the testobject is firmly brought into contact with the contacting portion of thefirst resin material part opposite the opening in the sensor arraysubstrate, the contacting portion may come into contact with the supportfilm, and with the piezoelectric body disposed in the support film. Thismay cause the support film and the piezoelectric body to rupture. Inthis aspect, the open ends of the first recess in the first resinmaterial part and the second recess in the second resin material partare connected to the other side of the sensor array substrate notcovered by the support film. Therefore, the first space is increasedinside the first recess, and includes the inside region with theopening. When the test object is firmly brought into contact with thecontacting portion of the first resin material part and pressure fromthe contacting portion increases the deflection on the support filmside, the contacting portion comes into contact with the sensor arraysubstrate. In other words, the contacting portion does not come intocontact with the support film and the piezoelectric body, and thesupport film and the piezoelectric body are prevented from rupturing.

Preferably, in the biological testing device as described above, theultrasonic wave transmitting/receiving part further includes adisplacement detecting section configured to detect displacement of theflexible portion, and an ultrasonic wave transmitting section configuredto execute one of a voltage-applying process for applying a voltage tothe piezoelectric body and a detection process for detecting a signaloutputted from the piezoelectric body, when displacement of the flexibleportion is detected by the displacement detecting section.

This aspect also includes a displacement detecting section for detectingdisplacement of the flexible portion. Therefore, when displacement ofthe flexible portion of the second resin material part is detected by,the displacement detecting section, contact between the test object andthe contacting portion can be detected. As a result, the voltageapplication process for transmitting ultrasonic waves from theultrasonic wave transmitting section is executed after contact with thetest object has been detected by the displacement detecting section. Inthis way, the ultrasonic waves reliably reach the test object.

Preferably, in the biological testing device as described above, theultrasonic wave transmitting/receiving part further includes adetermining section configured to determine whether an amount ofdisplacement of the flexible portion detected by the displacementdetecting section is within a range of a predetermined threshold value.The ultrasonic wave transmitting section is preferably configured toexecute one of the voltage-applying process and the detection processwhen the determining section has determined that the amount ofdisplacement in the flexible portion is within the range of thepredetermined threshold value.

However, when the test object is firmly brought into contact with thecontacting portion of the first resin material part, the support film onwhich the piezoelectric body is disposed may experience significantdeflection. In this situation, even when ultrasonic waves have beentransmitted to the test object, the ultrasonic waves reflected by thetest object may not be transmitted properly, and the detection processmay not be performed properly. When determining section determineswhether or not the amount of displacement is within the range of apredetermined threshold value, the ultrasonic wave transmitting sectionexecutes either the voltage application process in which ultrasonicwaves are transmitted, or the detection process. In other words, whenthe amount of displacement falls outside of the range for apredetermined threshold value, the ultrasonic wave transmitting sectiondoes not execute the voltage application process or detection process.The voltage application process can be executed, and the detectionprocess can be executed properly only when the amount of displacementfalls within the range of a predetermined threshold value.

BRIEF DESCRIPTION OF THE DRAWINGS

Referring now to the attached drawings which form a part of thisoriginal disclosure:

FIG. 1 is an outline view showing the appearance of the biologicaltesting device according to a first embodiment of the present invention.

FIG. 2 is a view showing how the biological testing device in the firstembodiment is attached to the human body.

FIG. 3 is a cross-sectional view schematically illustrating thebiological testing device in the first embodiment.

FIG. 4 is a cross-sectional view showing the ultrasonic transducer inthe first embodiment.

FIG. 5 is a schematic view showing the layout of the ultrasonictransducers in the first embodiment.

FIG. 6 is a cross-sectional view schematically illustrating theoperation of the biological testing device in the first embodiment.

FIG. 7 is a cross-sectional view schematically illustrating theoperation of the biological testing device in a second embodiment of thepresent invention.

FIG. 8 is a cross-sectional view schematically illustrating theoperation of the biological testing device in a modification of thesecond embodiment.

FIG. 9 is a block diagram of the biological testing device in a thirdembodiment of the present invention.

FIG. 10 is a cross-sectional view schematically illustrating theoperation of the biological testing device in a fourth embodiment of thepresent invention.

FIG. 11 is a block diagram of the biological testing device in a fourthembodiment of the present invention.

FIG. 12 is a flowchart for the biological testing device in the fourthembodiment of the present invention.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS First Embodiment

The following is a description of the first embodiment of the presentinvention, made with reference to the accompanying drawings. FIG. 1 isan outline view showing the appearance of the biological testing device1 according to a first embodiment of the present invention, which is anultrasonic sensor. FIG. 2 is a view showing how the biological testingdevice 1 in the first embodiment is attached to a human finger. FIG. 3is a cross-sectional view schematically illustrating the ultrasonictransceiver 10 incorporated into the biological testing device 1. Forillustrative purposes, the band 200 has been omitted in FIG. 3.

Configuration of Biological Testing Device

As shown in FIG. 1 and FIG. 2, the biological testing device 1 in thisembodiment is attached to a finger using a band 200. This biologicaltesting device 1 includes a main unit 100, and a band 200 for attachingthe main unit 100 to a finger. The main unit 100 includes an ultrasonictransceiver 10, a control unit (not shown) for controlling theultrasonic transceiver 10 and executing the biological testing, and afront panel 20 having input buttons for operating the biological testingdevice 1 and a display panel for displaying the test results. Whenultrasonic waves are transmitted to the finger by the biological testingdevice 1, ultrasonic waves reflected by a biological structure such asthe blood vessels in the finger are received, the blood flow is testedusing, for example, pulse and blood pressure, and other physiologicalconditions are tested. In the explanation of this embodiment, thebiological testing device 1 is a device attached to a human finger.However, the present invention is not restricted in this way. Forexample, it can be attached to other body parts such as a wrist, ankle,or toe. A securing attachment such as a band 200 does not have to beused. The tester can simply press the ultrasonic transceiver 10 againstthe body, and test internal conditions or prenatal conditions usingultrasonic waves. Also, the test object does not have to be the humanbody, and the device can be used to detect the interior or surface of atest object using ultrasonic waves.

When the biological testing device 1 is attached to a finger, theultrasonic transceiver 10 is disposed on the side making contact withthe finger. As shown in FIG. 1 and explained below, the device isequipped with a contact portion 522 serving as the contacting portion,and a flexible portion 532. Because the main unit 100 is forciblybrought into contact with the finger by the band 200, the tester doesnot have to apply pressure to the ultrasonic transceiver 10, and thecontact portion 522 comes into ready contact with the finger. Also,ultrasonic waves can be transmitted between the body and the ultrasonictransceiver 10.

The contact unit is connected electrically to the ultrasonic transceiver10 and various configurational elements of the front panel 20 so thattheir operation can be controlled. More specifically, the control unitcontrols the operation of the ultrasonic transceiver 10 by switchingbetween an ultrasonic transmission mode and an ultrasonic receptionmode. Ultrasonic waves are transmitted in the ultrasonic transmissionmode, and ultrasonic waves are received in the ultrasonic receptionmode. Also, in the ultrasonic reception mode, blood flow is measuredusing pulse and blood pressure based on the detection signals outputtedfrom the ultrasonic transceiver 10. Also, the control unit, for example,starts or stops testing and displays test results on the display panelbased on control signals inputted from the input buttons on the frontpanel 20.

Configuration of Ultrasonic Transceiver

As shown in FIG. 3, the ultrasonic transceiver 10 in the biologicaltesting device 1 includes a sensor array substrate 2 serving as thesupport body, a support film 3 laminated on the sensor array substrate2, a plurality of ultrasonic transducers 4 arranged on the support film3 for sending and receiving ultrasonic waves, a resin material 5covering the support film 3 to form a space S with the support film 3,and an ultrasonic wave transmitting medium 6 filling the space S. Theconfiguration of the ultrasonic transducers 4 is explained below.

The sensor array substrate 2 has a first support portion 21 forming theregion in which the plurality of ultrasonic transducers 4 are arranged,and a second support portion 22 adjacent to the outer peripheral portionof the first support portion 21. These can be formed, for example, froma semiconductor forming material such as single-crystal silicon (Si).Also, openings 211 having a round shape in plan view (sensor plan view),i.e., when the sensor array substrate 2 is viewed from the directionperpendicular to the plane of the sensor array substrate 2, are formedcorresponding to the positions in which the ultrasonic transducers 4 areformed, as explained below. The radius (a) of the openings 211 is, forexample, 50 μm.

Also, the support film 3 is formed on top of the sensor array substrate2 to a uniform thickness dimension. In this way, the openings 211 areclosed off by the support film 3. The thickness dimension h₁ of thesupport film 3 can be, for example 2 μm. In the following explanation,the region of the support film 3 closing off the openings 211 isreferred to as the diaphragm 30. More specifically, the support film 3is formed with a two-layer structure composed of a SiO₂ layer formed ontop of the sensor array substrate 2, and a ZrO₂ layer formed on top ofthe SiO₂ layer. The support film 3 can be formed, for example, by usingheat to oxidize a sensor array substrate 2 made of Si to form the SiO₂layer, and then applying a Zr layer and thermal oxidizing the Zr layerto form the ZrO₂ layer. The support film 3 has a two-layer structurecomposed of a SiO₂ layer and a ZrO₂ layer, and the followingcalculations are made in this embodiment so that the two layers in thesupport film 3 are adjusted, and the Young's modulus of the support film3 is approximately 70 GPa. Because, as mentioned above, the radius (a)of the openings 211 is 50 μm, the radius (a) of the diaphragm 30 is thesame (i.e., 50 μm), and the area is 7.85×10⁻³ (mm²). When the flexuralrigidity D of the diaphragm 30 is calculated using Equation (1) below,where Poisson's ratio v is 0.3, the result is 5.13×10⁻⁸ (Pa·m³). In thisembodiment, the openings 211 have a round shape for good stress balancewhen the diaphragm 30 is deflected. However, the openings can also berectangular or oval shaped.

$\begin{matrix}{{{Equation}\mspace{14mu} (1)}\mspace{616mu}} & \; \\{D = \frac{{Eh}^{3}}{12\left( {1 - v^{2}} \right)}} & (1)\end{matrix}$

D: flexural rigidity (Pa·m³), E: Young's modulus (Pa), h: thicknessdimension (m), v: Poisson's ratio

When the maximum deflection ω_(max) of the diaphragm 30 used to closethe opening 211 was calculated using Equation (2) below based on theflexural rigidity D, the result was 1.9×10⁻¹²×q (m).

$\begin{matrix}{{{Equation}\mspace{14mu} (2)}\mspace{616mu}} & \; \\{w_{{ma}\; x} = \frac{{qa}^{4}}{64D}} & (2)\end{matrix}$

ω_(max): maximum deflection (m), q: load per unit area (Pa), a: opening,radius of flexible portion (m)

The resin material 5 comes into contact with the outer peripheral edgeof the support film 3 on the sensor array substrate 2, and surrounds thesensor array substrate 2, forming a space S with the sensor arraysubstrate 2 that is sealed off from the outside space. This space S isfilled with an ultrasonic wave transmitting medium 6. This resinmaterial 5 can be formed, for example, using silicone rubber. Morespecifically, the resin material 5 includes a partitioning portion 51partitioning the space S into a first space S1 and a second space S2,and forming a communication hole 511 to allow the spaces S1, S2 tocommunicate, a first resin portion 52 forming the first space S1 on topof the first support portion 21 along with the partitioning portion 51and the support film 3, and a second resin portion 53 forming the secondspace S2 on top of the second resin portion 22 along with thepartitioning portion 51 and the support film 3.

The first resin portion 52 has a first resin wall portion 521 standingerect along the outer peripheral edge of the first support portion 21 onthe sensor array substrate 2, and a contact portion 522 facing one sideof the main unit 100 opposite the first support portion 21. Here, thecontact portion 522 is formed from the end portion of the support film 3away from the first resin wall portion 521 to the end portion of thesupport film 3 away from the partitioning portion 51. In other words,the first resin wall portion 521, the contact portion 522, and thepartitioning portion 51 constitute the first resin material of thepresent invention, and a portion formed by the first resin wall portion521, the contact portion 522, and the partitioning portion 51 is thefirst recess of the present invention. Also, the first resin wallportion 521, the contact portion 522, and the partitioning portion 51form the first space S1 sealed off from the outside space, along withthe support film 3 formed on top of the sensor array substrate 2.

The second resin portion 53 has a second resin wall portion 531 standingerect along the outer peripheral edge of the second support portion 22disposed over the support film 3 outside of the first support portion21, and a flexible portion 532 facing one side of the main unit 100opposite the second support portion 21. Here, the flexible portion 532is formed from the end portion of the support film 3 away from thesecond resin wall portion 531 to the end portion of the support film 3away from the partitioning portion 51. In other words, the second resinwall portion 531, the flexible portion 532, and the partitioning portion51 constitute the second resin material of the present invention, and aportion formed by the second resin wall portion 531, the flexibleportion 532, and the partitioning portion 51 is the second recess of thepresent invention. Also, the second resin wall portion 531, the contactportion 532, and the partitioning portion 51 form the second space S2sealed off from the outside space, along with the support film 3 formedon top of the sensor array substrate 2.

As mentioned above, the partitioning portion 51 is the portionpartitioning the space S into a first space S1 and a second space S2. Itis formed along the boundary portion between the first support portion21 and the second support portion 22 on top of the support film 3 in thesensor plan view. Also, as shown in FIG. 3, the communication whole 511formed by the partitioning portion 51 is formed between the support film3 and the partitioning portion 51. However, it can be formed through thepartitioning portion 51 as well. As for the number of communicationholes 511 formed, a plurality of communication holes 511 can be formedto allow the first space S1 and the second space S2 to communicate. Forexample, a single long communication hole 511 can be formed in thedirection of the wall surface in the partitioning portion 51 (i.e., inthe direction perpendicular to the surface of the paper in FIG. 3).

In the resin material 5 mentioned above, the wall thickness dimension Tof the first resin wall portion 521 and the second resin wall portion531 can be, for example 1 mm. The thickness dimension h₂ of the contactportion 522 and the flexible portion 532 is also 1 mm. Also, the heightdimension H of the resin material 5 covering the support film 3 (i.e.,the height dimension H of the first resin wall portion 521, the secondresin wall portion 531, and the partitioning portion 51 from the supportfilm 3) is 2 mm. Also, the size of the contact portion 522 is the sensorplan view is 3 mm×3 mm, and the size of the flexible portion 532 is 3mm×2 mm. In other words, the area of the flexible portion 532 is 6(mm²). Also, as mentioned above, silicone rubber can be used as theresin material 5. However, the Young's modulus of silicone rubber isapproximately 4.0×10⁶ (Pa) under temperature conditions from roomtemperature to body temperature. When the flexural rigidity D of theflexible portion 532 is calculated using Equation (1) above, wherePoisson's Ratio v is 0.5, the result is 4.44×10⁻⁴ (Pa·m³). In thisembodiment, the flexible portion 532 has a rectangular shape in thesensor plan view. However, in order to facilitate a comparison of theflexible portion 532 to the diaphragm 30, which is round-shaped insensor plan view, the flexible portion 532 is assumed to have a roundshape with a radius (a) of 1.5×10⁻³ (m) based on a flexible portion 532with an area of 6 (mm²). When the maximum deflection ω_(max) of theflexible portion 532 is calculated using Equation (1) above based on theflexural rigidity D, the result is 1.78×10⁻¹⁰×q (m). In this embodiment,silicone rubber is used as the resin material 5. However, it is notrestricted to this material. Any material with similar properties can beused.

Also, in this embodiment, the volume of the first space S1 is greaterthan the volume of the second space S2. There is no particularrestriction on the volumes of the spaces S1, S2. The volume of thesecond space S1 can be greater than the volume of the first space S1, orboth can have the same volume. In this embodiment, only one second spaceS2 is formed. However, for example, two second spaces S2 can be formedto interpose the first space S1. They can also be formed around theentire outer periphery of the first space S1.

The ultrasonic transmitting medium 6 is used to more effectivelytransmit ultrasonic waves. In this embodiment, a liquid having nearlythe same acoustic impedance as the human body is used, such as water orsaline, because the device is used to test the interior of a human bodyusing ultrasonic waves. Other examples of ultrasonic transmitting media6 include a high-viscosity carboxyl methylcellulose aqueous solution,castor oil, and liquid paraffin.

FIG. 4 is a cross-sectional view showing an ultrasonic transducer 4.FIG. 5 is a schematic view showing the layout of the ultrasonictransducers 4. An ultrasonic transducer 4 is an element that transmitsultrasonic waves based on signals from the control unit, receivesultrasonic waves, and outputs them to an arithmetic control unit. Asshown in FIG. 3, a plurality of ultrasonic transducers 4 are disposed ontop of the first support portion 21 of the sensor array substrate 2. Forexample, ten can be arranged vertically and ten can be arrangedhorizontally in the sensor plan view, as shown in FIG. 3 and FIG. 5.These ultrasonic transducers 4 have a first support portion 21 on thesensor array substrate 2, a support film 3, and a piezoelectriccomponent 41. As mentioned above, the first support portion 21 is theportion on the sensor array substrate 2 in which the ultrasonictransducers 4 are arranged. Openings 211 are formed in the positionswhere the ultrasonic transducers 4 are formed. As mentioned above, thesupport film 3 is formed on top of the sensor array substrate 2, and adiaphragm 30 is formed to close off the openings 211.

The piezoelectric component 41 is a film-shaped component formed on thediaphragm 30 in the center position of the diaphragm 30. Thepiezoelectric component 41 is formed with a substantially round shape inplan view and has a diameter dimension L of, for example, 80 μm, whichis smaller than the diameter dimension of the openings 211 (100 μm). Aplurality of piezoelectric components 41 are formed so that the pitch Pof the piezoelectric components 41 is 200 μm. A piezoelectric component41 has a piezoelectric film 411, and electrodes (lower electrode 412 andupper electrode 413) to apply voltage to the piezoelectric film 411.

A piezoelectric film 411 is, for example, lead zirconate titanate (PZT)formed into film. In this embodiment, PZT is used for the piezoelectricfilm 411. However, any material that shrinks in the planar directionwhen voltage is applied can be used. Examples include lead titanate(PbTiO₃), lead zirconate (PbZrO₃), and lead lanthanum titanate ((Pb,La)TiO₃). The lower electrode 412 and the upper electrode 413 are formedwith the piezoelectric film 411 interposed between them. The upperelectrode 413 and the lower electrode 412 are drawn from a drawingportion (not shown) formed on the sides of the openings 211, and areconnected to the control unit of the biological testing device 1.

When a predetermined drive voltage is applied from the control unitbetween the electrodes 412, 413 of the piezoelectric component 41 in anultrasonic transducer 4, the piezoelectric film 411 expands andcontracts in the planar direction. This vibrates the diaphragm 30 in thefilm thickness direction, and ultrasonic waves at a frequencycorresponding to the cycle of the predetermined drive voltage aretransmitted from the diaphragm 30 towards the contact portion 522. Inother words, the ultrasonic transducer 4 functions as a transmissionunit for transmitting ultrasonic waves towards a finger. The ultrasonictransducer 4 also functions as a receiving unit for receiving ultrasonicwaves reflected by, for example, the blood vessels inside the finger. Atthis time, the diaphragm 30 is vibrated by the reflected ultrasonicwaves, and electric signals corresponding to their amplitude andfrequency are outputted from the piezoelectric component 41 to thecontrol unit via the lower electrode 412 and the upper electrode 413.Here, the control unit switches the mode of the ultrasonic transducer 4between the ultrasonic transmission mode and the ultrasonic receptionmode so that the ultrasonic transducer 4 functions either as a receivingunit or a transmitting unit. In this embodiment, the ultrasonictransducers 4 are combination ultrasonic wave transmitting units andreceiving units, and the control unit switches between these functions.However, dedicated ultrasonic wave transmitting transducers can also becombined with dedicated ultrasonic wave receiving transducers. In oneexample, the transmitting transducers and the receiving transducers canbe arranged in alternating fashion on a single array substrate. Inanother example, a transmission array substrate composed of a pluralityof transmitting transducers, and a reception array substrate composed ofa plurality of receiving transducers are arranged in separate locations.

Operation of Biological Testing Device

FIG. 6 is a cross-sectional view schematically illustrating theoperation of the biological testing device 1. In order to test vascularconditions using this biological testing device 1, the biologicaltesting device 1 is first attached to a finger using the band 200 (seeFIG. 1). By adjusting the fastening strength of the band 200, thebiological testing device 1 is attached and secured so as to press thecontact portion 522 of the biological testing device 1 against thefinger. At this time, the amount of deflection in the diaphragm 30depends on the fastening strength of the band 200. However, the contactportion 522 usually can be brought into contact with the finger at amaximum deflection ω_(max) for the diaphragm 30 of approximately1.9×10⁻¹²×q (m).

When the biological testing device 1 is attached, the contact portion522 is facing the support film 3. This reduces the volume of the firstspace S1, and the pressure inside the first space S1 increases. Here, asmentioned above, the flexural rigidity D of the diaphragm 30 issufficiently greater than the flexural rigidity D of the flexibleportion 532. As a result, the rise in pressure inside the first space S1causes the ultrasonic wave transmitting medium 6 inside the first spaceS1 to flow via the communication hole 511 into the second space S2, andthe flexible portion 532 having low flexural rigidity D bulges towardsthe outside space. Because, as mentioned above, the maximum deflectionω_(max) of the diaphragm 30 is approximately 1.9×10⁻¹²×q (m) and themaximum deflection ω_(max) of the flexible portion 532 is approximately1.78×10⁻¹⁰×q (m), the flexible portion 532 bulges and the diaphragm 30experiences no deflection.

For example, when the user operates the input buttons disposed on thefront panel 20 (see FIG. 2) and operating signals to start themeasurements are inputted to the control unit, the control unit appliesa predetermined drive voltage between the electrodes 412, 413 of thepiezoelectric component 41. This causes the ultrasonic transducers 4 totransmit ultrasonic waves from the diaphragm 30 towards the finger.These ultrasonic waves are transmitted inside the finger attached to thecontact portion 522 via an ultrasonic wave transmitting medium 6 havingsubstantially the same acoustic impedance as the human body and via thecontact portion 522. Immediately after the ultrasonic waves have beentransmitted, the application of voltage to the electrodes 412, 413 inthe ultrasonic transducers 4 is stopped. In other words, the controllerswitches the ultrasonic transducers 4 from ultrasonic transmission modeto ultrasonic reception mode.

When the ultrasonic waves transmitted from the ultrasonic transducers 4have been reflected by, for example, the blood vessels inside thefinger, they are again propagated from the contact portion 522 throughthe ultrasonic wave transmitting medium 6, and received by the diaphragm30. The diaphragm 30 is vibrated based on the intensity of the receivedultrasonic waves, and detection signals (electric current) is outputtedfrom the piezoelectric components 41 on the diaphragm 30 to the controlunit. Next, the control unit measures blood flow conditions, such as thepulse and blood pressure, based on the inputted detection signals and,for example, displays the detection results on the display paneldisposed on the front panel 20.

Operational Effects of First Embodiment

The biological testing device 1 in the first embodiment has thefollowing effects. In this embodiment, a first space S1 is formed by theregion of the support film 3 closing off the openings 211 and the firstresin material 52, and the first space S1 is filled with an ultrasonicwave transmitting medium 6. Because a liquid is used as the ultrasonicwave transmitting medium 6 having substantially the same acousticimpedance as the acoustic impedance of the human body, ultrasonic wavescan be propagated properly without attenuation. Also, because a contactportion 522 is disposed in the first resin portion 52 facing theopenings 211, and the contact portion 522 is brought into contact with afinger, the ultrasonic waves generated by the vibrating diaphragm 30 canbe transmitted into the finger, and the ultrasonic waves reflected bythe blood vessels in the finger can be transmitted to the diaphragm 30.Here, as described above, when the contact portion 522 of the firstresin portion 52 is brought into contact with a finger, the contactportion 522 experiences deflection, and the pressure inside the firstspace S1 increases. However, in this embodiment, a second space S2communicating with the first space S1 is formed by the second resinportion 53, and a flexible portion 532 having a flexural rigidity Dlower than the flexural rigidity D of the diaphragm 30 is disposed inthe second resin portion 53. Thus, even when the pressure inside thefirst space S1 has increased, the flexible portion 532 bulges towardsthe outside space, and the ultrasonic wave transmitting medium 6 insidethe first space S1 flows into the second space S2. Therefore,deformation of the diaphragm 30 can be suppressed even when the contactportion 522 is brought into contact with a finger and the pressureinside the first space S1 increases. Also, the vibration of thediaphragm 30 is not attenuated and ultrasonic waves are sent andreceived properly when voltage is applied to the piezoelectric component41 and the diaphragm 30 is vibrated, and when ultrasonic waves arereceived and the diaphragm 30 is vibrated.

Second Embodiment

The following is an explanation with reference to the drawings of thebiological testing device 1A in the second embodiment. FIG. 7 is across-sectional view schematically illustrating the operation of thebiological testing device 1A in the second embodiment. In theexplanation of the drawing, the configurational elements identical tothose in the previous embodiment are denoted by the same referencenumerals. Further explanation of these elements has been omitted. Thesame is true of other embodiments explained below. In the biologicaltesting device 1A in the second embodiment, a space S is formed by asensor array substrate 2 and a resin material 5, and a support substrate3 is arranged on the sensor array substrate 2 on the outside space side.On these points, this embodiment differs from the first embodiment. Inother words, the arrangement of the ultrasonic transducers 4 in thefirst embodiment has been changed.

In the biological testing device 1A, the support film 3 is arranged onthe sensor array substrate 2 on the outside space side, and thepiezoelectric component 41 is arranged on the support film 3 on the sideopposite the side facing the contact portion 522 of the first resinportion 52. In other words, the piezoelectric component 41 is arrangedoutside of the first space S1. In this configuration, the opening 211 inthe first support portion 21 forms the first space S1, and the opening211 is filled with an ultrasonic wave transmitting medium 6.

In an ultrasonic transducer 4 of the first embodiment, the ultrasonicwaves were transmitted from the surface of the piezoelectric film 411 onthe side opposite the side facing the support film 3. However, in anultrasonic transducer 4 of the present embodiment, the ultrasonic wavesare transmitted from the surface of the piezoelectric film 411 on theside facing the support film 3.

Even though, as described above, ultrasonic waves are transmitted fromthe surface of the piezoelectric film 411 on the side facing the supportfilm 3 in the biological testing device 1A of the second embodiment, theeffects are similar to those of the first embodiment. Even when thesupport portion 522 is firmly brought into contact with a finger, thecontact portion 522 is pressed, and significant deflection isexperienced on the support film 3 side, the contact portion 522 comesinto contact with the first support portion 21 of the sensor arraysubstrate 2. In other words, it does not come into contact with thepiezoelectric component 41 or support film 3, and damage to thepiezoelectric component 41 and the support film 3 can be prevented.

Modification of the Second Embodiment

FIG. 8 is a cross-sectional view schematically illustrating theoperation of the biological testing device 1B in a modification of thesecond embodiment. In this modification, a through-hole 212 passesthrough the first support portion 21 in the direction perpendicular tothe thickness direction of the support film 3.

Here, when the contact portion 522 is firmly pressed against a finger,the contact portion 522 comes into contact with the first supportportion 21 as shown in FIG. 8. In the configuration of the secondembodiment under this situation, the first space S1 is partitioned bythe first resin portion 52, and the ultrasonic wave transmitting medium6 on the second space S2 side of the first space S1 readily flows intothe second space S1, whereas the ultrasonic wave transmitting medium 6in the first space S1 on the side opposite that of the second space S2is less likely to flow into the second space S2 because of the firstsupport portion 21. When the contact portion 522 comes into contact withthe first support portion 21, the contact portion 522 closes off theopening 211, and the diaphragm 30 experiences deflection because of therising pressure inside the first space S1.

In the configuration of this modification, a through-hole 212 is formedin the first support portion 21 even when the contact portion 522 comesinto contact with the first support portion 21. As a result, theultrasonic wave transmitting medium 6 on the side of the first space S1opposite the side with the second space S1 is allowed to flow into thesecond space S2 via the through-hole 212. Therefore, the effects aresimilar to those of the other embodiments. When the contact portion 522comes into contact with the first support portion 21 and the contactportion 522 closes off the opening 211, the diaphragm 30 is preventedfrom experience deflection due to an increase in pressure inside thefirst space S1.

Third Embodiment

The following is an explanation with reference to the drawings of thebiological testing device 1C in the third embodiment. In the followingexplanation, both FIG. 3 and FIG. 4 are referenced. FIG. 9 is a blockdiagram of the biological testing device 1C in the third embodiment. Thebiological testing device 1C in the third embodiment has a displacementsensor 7 serving as a displacement detecting section for detectingdisplacement of the second resin material 52, and a control unit 8 fordetecting detection signals from the displacement sensor 7 andcontrolling the biological testing device 1C accordingly. It differsfrom the other embodiments in this respect.

The displacement sensor 7 detects displacement of the flexible portion532 in the second resin portion 53. On detecting displacement of theflexible portion 532, the displacement sensor 7 outputs a detectionsignal to the control unit 8. Here, the displacement sensor 7 can be acontact sensor or a differential transformer. In this case, displacementis detected based on the voltage difference generated in two coils byelectromagnetic induction. The present invention is not restricted to acontact sensor. A non-contact sensor can also be used. For example, anelectrostatic capacitance sensor can be used in which displacement isdetected based on the change in electrostatic capacitance. Displacementcan be detected using an ultrasonic transducer based on the ultrasonicwave reflection time. A strain sensing element can also be installed inthe flexible portion 532 to detect displacement.

The control unit 8 includes a drive voltage output unit 81 serving asultrasonic wave transmitting section in which voltage signals areoutputted to the electrodes 412, 413 of an ultrasonic transducer 4(voltage application process), and blood flow conditions such as pulseand blood pressure are measured based on the voltage signals outputtedfrom the piezoelectric component 41 (detection process). When detectionsignals are inputted from the displacement sensor 7, the drive voltageoutput unit 81 outputs voltage signals to the electrodes 414, 413 of anultrasonic transducer 4. When detection signals are not inputted fromthe displacement sensor 7, the drive voltage output unit 81 detects thatthe finger has been removed from the contact portion 522, and theoutputting of voltage signals to the electrodes 412, 413 is stopped. Thedrive voltage output unit 81 detects the voltage signals outputted fromthe piezoelectric component 41 receiving ultrasonic waves, and measuresthe blood flow conditions such as pulse and blood pressure based on thevoltage signals.

First, when a finger comes into contact with the contact portion 522,the contact portion 522 experiences internal deflection, and theultrasonic wave transmitting medium 6 in the first space S1 flows intothe second space S2 via the communication hole 511. The flexible portion532 composing the second space S2 bulges, and the displacement sensor 7detects the displacement and outputs a detection signal to the drivevoltage output unit 81 of the control unit 8. When detection signalshave been inputted from the displacement sensor 7, the drive voltageoutput unit 81 determines that a finger has come into contact with thecontact portion 522. The ultrasonic transducers 4 are switched toultrasonic transmission mode, and voltage signals are outputted to theelectrodes 412, 413 of the ultrasonic transducers 4. Thus, as mentionedabove, the electrodes 412, 413 apply a predetermined voltage to thepiezoelectric film 411 based on the inputted voltage signals, andultrasonic waves are transmitted from the diaphragm 30 to the contactportion 522. The drive voltage output unit 81 switches the ultrasonictransducers 4 to ultrasonic wave transmission mode. When ultrasonicwaves reflected by the finger in contact with the contact portion 522are received by the diaphragm 30, voltage signals are outputted to thedrive voltage output unit 81 of the control unit 8, and the drivevoltage output unit 81 measures the blood flow conditions such as pulseand blood pressure based on the voltage signals.

In addition to the effects of the first embodiment, the biologicaltesting device 1C in the third embodiment has the following effect. Inthis embodiment, the control unit 8 determines that a finger has comeinto contact with the contact portion 522, and the drive voltage outputunit 81 of the control unit 8 outputs voltage signals to the electrodes412, 413. As a result, ultrasonic waves are reliably transmitted andultrasonic waves reliably reach a finger only when a finger has comeinto contact with the contact portion 522.

Fourth Embodiment

The following is an explanation of the biological testing device 1D inthe fourth embodiment with reference to FIG. 10 and FIG. 11. Thebiological testing device 1D of the fourth embodiment has a distancedetecting sensor 9 serving as the displacement detecting section fordetecting the amount of displacement in the flexible portion 532 of thesecond resin portion 53, and a control unit 8A for detecting detectionsignals from the distance detecting sensor 9 and controlling thebiological testing device 1D accordingly. It is different from the otherembodiments in this respect. More specifically, in the third embodiment,when the displacement sensor 7 detects that the flexible portion 532 ofthe second resin portion 53 has been displaced, the control unit 8switches the ultrasonic transducers 4 to the ultrasonic wavetransmission mode. However, in this embodiment, the distance detectingsensor 9 measures the amount of deflection (amount of displacement) inthe flexible portion 532 of the second resin portion 53. The controlunit 8 then switches the ultrasonic transducers 4 to the ultrasonic wavetransmission mode based on the amount of deflection.

The distance detecting sensor 9 detects the amount of deflection in theflexible portion 532 of the second resin portion 53. When the distancedetecting sensor 9 has detected the amount of deflection in the flexibleportion 532, detection signals are outputted to the control unit 8A.Here, the distance detecting sensor 9 detects the amount of deflectionin the flexible portion 532 using the ultrasonic transducers based onthe ultrasonic wave reflection time. As shown in FIG. 10, the sensor isdisposed on the second support portion 22 of the support film 3. Insteadof using the ultrasonic transducers, the distance detecting sensor 9 canbe an electrostatic capacitance sensor that detects the amount ofdeflection based on the change in electrostatic capacitance. Theplurality of ultrasonic transducers 4 arranged on the first supportportion 21 can also be disposed on the second support portion 22 as thedistance detecting sensor 9. Here, the openings 211 formed in the firstsupport portion 21 are formed in the second support portion 22, and theregion of the support film 3 closing off the openings 211 serves as thediaphragm 30. Ultrasonic transducers 4 are then arranged above thediaphragm 30. In this configuration, the first support portion 21 andthe second support portion 22 are identical, and ultrasonic transducers4 can be disposed above the diaphragm 30. As a result, the distancedetecting sensor 9 can be disposed on the second support portion 22 atthe same time the ultrasonic transducers 4 are disposed on the firstsupport portion 21. This simplifies the manufacturing process.

The control unit 8A has a drive voltage output unit 81A, a determinationunit 82 (determining section), and a storage unit 83. The storage unit83 is composed of a recording medium such as a memory unit or a harddisk. It stores in a readable format the displacement threshold valuedata 831 (predetermined threshold) and program needed in the processexecuted by the determination unit 82. The displacement threshold valuedata 831 is data on the amount of deflection (amount of displacement)experienced by the flexible portion 532 of the second resin portion 53when a finger has come into contact with the contact portion 522 of thefirst resin portion 52 that does not affect the support film 3.

When input buttons on the front panel 20 (see FIG. 2) have beenoperated, the drive voltage output unit 81A outputs voltage signals tothe distance detecting sensor 9. The drive voltage output unit 81A alsooutputs voltage signals to the electrodes 412, 413 of the ultrasonictransducers 4 based on the determination signals from the determinationunit 82 (voltage application process). In addition, the drive voltageoutput unit 81A detects the voltage signals outputted from piezoelectriccomponents 41 that have received ultrasonic waves, and measures bloodflow conditions such as pulse and blood pressure based on the voltagesignals (detection process).

When output signals have been inputted from the distance detectingsensor 9, the determination unit 82 retrieves displacement thresholdvalue data 831 from the storage unit 83, and compares the displacementthreshold value data to the amount of displacement in the flexibleportion 532. When the determination unit 82 has determined that theamount of deflection in the flexible portion 532 is within the range ofthe displacement threshold value data 831, determination signals areoutputted to the drive voltage output unit 81A. When the determinationunit 82 has determined that the amount of deflection in the flexibleportion 532 is outside of the range of the displacement threshold valuedata 831, a notice to adjust the finger is displayed on the displaypanel in the front panel 20 (see FIG. 2).

The following is an explanation of the operations performed by thebiological testing device 1D in the fourth embodiment with reference tothe flowchart in FIG. 12. First, when the input buttons on the frontpanel 20 (see FIG. 2) have been operated, the drive voltage output unit81A starts the distance detecting sensor 9 (Step S1). Next, whendetection signals have been inputted from the distance detecting sensor9, the determination unit 82 compares the displacement threshold valuedata 831 to the amount of deflection experienced by the flexible portion532 (Step S2). When the amount of deflection experienced by the flexibleportion 532 has been determined to be within the range of thedisplacement threshold value data 831 in the comparison, the drivevoltage output unit 81A switches the ultrasonic transducers 4 to theultrasonic wave transmission mode, and outputs voltage signals to theelectrodes 412, 413 of the ultrasonic transducers 4 (Step S3). The drivevoltage output unit 81A then switches the ultrasonic transducers 4 tothe ultrasonic wave reception mode, and measures the blood flowconditions such as pulse and blood pressure based on the voltage signalsinputted from the piezoelectric components 41 (Step S4). When the amountof deflection experienced by the flexible portion 532 has beendetermined to be outside of the range of the displacement thresholdvalue data 831 in the comparison, the determination unit 82 displays anotice to adjust the finger on the display panel (Step S5).

In addition to the effects of the first embodiment, the biologicaltesting device 1D in the fourth embodiment has the following effect.

According to this embodiment, the distance measuring sensor 9 detectsthe amount of deflection experienced by the flexible portion 532, andthe determination unit 82 compares the amount of deflection to thedisplacement threshold value data 831. When the amount of deflectionexperienced by the flexible portion 532 falls outside of the range ofthe displacement threshold value data 831, a notice is displayedindicating that the finger has to be pressed more firmly against theflexible portion 532. In this situation, the drive voltage output unit81A does not perform the voltage application process in which ultrasonicwaves are transmitted. Therefore, when the amount of deflectionexperienced by the flexible portion 532 falls outside of the range ofthe displacement threshold value data 831, the drive voltage output unit81A does not perform the voltage application process and the detectionprocess. The voltage application process can only be executed and thedetection process can only be executed properly when the amount ofdeflection is within the range of the displacement threshold value data831.

Modification of Embodiments

The present invention is not limited to the embodiments described above.The present invention includes any modification or improvement within ascope allowing the object of the present invention to be achieved.

In these embodiments, the space S is partitioned into a first space S1and a second space S₂ by a partitioning portion 51. However, apartitioning portion 51 does not have to be used. In this case, when afinger is brought into contact with the contact portion 522 and thecontact portion 522 experiences internal deflection, the ultrasonic wavetransmitting medium 6 can flow into the space S and the flexible portion532 bulges.

In these embodiments, the first resin portion 52 and the second resinportion 53 are made of the same material and have the same thicknessdimensions h2, T. However, they can be made of different materials andcan have different thickness dimensions. Also, the flexible portion 532alone can be made of a different material and have a different thicknessdimension. Also, the flexible portion 532 can have a round shape in thesensor plan view.

In the embodiments, the flexible portion 532 is formed opposite thesecond support portion 22. However, it can also be formed on the sidewith the second resin portion 53.

In the embodiments, the size of the contact portion 522 in the firstresin portion 52 is 3 mm×3 mm, relative to a plan view of the sensor.However, the present invention is not limited to this arrangement; thesize of the contact portion 522 can be determined by the shape and sizeof the test object making contact therewith.

In the embodiments, a communication hole 511 is disposed forcommunication between the first space S1 and the second space S2.However, the first space S1 and the second space S2 can also communicatevia a cylindrically shaped member such as a tube. In this case, thesecond space S2 is configured solely using the second resin portion 53,which is formed in the shape of a pouch, and the second resin portion 53does not need to be secured to the support film 3 and the sensor arraysubstrate 2.

In the embodiments, the second space S2 is formed on the second supportportion 22. However, the present invention is not limited to thisarrangement. For example, it can be disposed on the side surface of themain unit 100, and the flexible portion 532 exposed on the side surfaceof the main unit 100. The flexible portion 532 can also be exposed in aportion of the front panel 20 on the main unit 100. This would allow theamount of displacement in the flexible portion 532 to be confirmedvisually in order to determine whether the finger was in contact withthe contact portion 522. In this embodiment, the support film 3 isarranged on top of the sensor array substrate 2. However, it can also bearranged only in those places closing off the openings 211 in the firstsupport portion 21. In the embodiments, the openings 211 pass throughthe sensor array substrate 2. However, the present invention is notlimited to this arrangement. Recesses can also be used. Here, thesupport film 3 would close off the openings in the recesses. A supportfilm 3 can also be formed on the bottom surface of the recesses.

GENERAL INTERPRETATION OF TERMS

In understanding the scope of the present invention, the term“comprising” and its derivatives, as used herein, are intended to beopen ended terms that specify the presence of the stated features,elements, components, groups, integers, and/or steps, but do not excludethe presence of other unstated features, elements, components, groups,integers and/or steps. The foregoing also applies to words havingsimilar meanings such as the terms, “including”, “having” and theirderivatives. Also, the terms “part,” “section,” “portion,” “member” or“element” when used in the singular can have the dual meaning of asingle part or a plurality of parts. Finally, terms of degree such as“substantially”, “about” and “approximately” as used herein mean areasonable amount of deviation of the modified term such that the endresult is not significantly changed. For example, these terms can beconstrued as including a deviation of at least ±5% of the modified termif this deviation would not negate the meaning of the word it modifies.

While only selected embodiments have been chosen to illustrate thepresent invention, it will be apparent to those skilled in the art fromthis disclosure that various changes and modifications can be madeherein without departing from the scope of the invention as defined inthe appended claims. Furthermore, the foregoing descriptions of theembodiments according to the present invention are provided forillustration only, and not for the purpose of limiting the invention asdefined by the appended claims and their equivalents.

What is claimed is:
 1. A biological testing device comprising: a devicebody including an ultrasonic wave transmitting/receiving part; and amounting member configured and arranged to mount the device body on atest object, wherein, the ultrasonic wave transmitting/receiving partincludes a sensor array substrate including a plurality of ultrasonictransducers arranged thereon, a first resin material part forming afirst space closed off from an outside space between the first resinmaterial part and the sensor array substrate with the first resinmaterial part facing the ultrasonic transducers, a second resin materialpart forming a second space communicating with the first space, thesecond space being closed off from the outside space, at least a portionof the second resin material part including a flexible portionconfigured and arranged to bulge toward the outside space, an ultrasonicwave transmitting medium filling the first space and the second space.2. The biological testing device of claim 1, wherein the sensor arraysubstrate includes a plurality of openings, and each of the ultrasonictransducers includes a support film disposed on the sensor arraysubstrate and covering a corresponding one of the openings; apiezoelectric body disposed on an inner region of the corresponding oneof the openings in a plan view seen in a thickness direction of thesupport film, the piezoelectric body being formed by laminating a lowerelectrode, a piezoelectric film, and an upper electrode in this order onthe support film.
 3. The biological testing device of claim 2, whereinthe support film covers one side of the sensor array substrate, thefirst resin material part has a first recessed portion opening towardsthe support film with the first space being formed by connecting an openend of the first recessed portion to the support film, the second resinmaterial part has a second recessed portion opening towards the supportfilm with the second space being formed by connecting an open end of thesecond recessed portion to the support film, and the first resinmaterial part and the second resin material part are integrally formed.4. The biological testing device of claim 2, wherein the openings in thesensor array substrate passes through the sensor array substrate in thethickness direction, the support film covers one side of the sensorarray substrate, the first resin material part has a first recessedportion opening towards the support film with the first space beingformed by connecting an open end of the first recessed portion toanother side of the sensor array substrate opposite from the one side,and the second resin material part has a second recessed portion openingtowards the support film with the second space being formed byconnecting an open end of the second recessed portion to the anotherside of the sensor array substrate.
 5. The biological testing device ofclaim 1, wherein the ultrasonic wave transmitting/receiving part furtherincludes a displacement detecting section configured to detectdisplacement of the flexible portion, and an ultrasonic wavetransmitting section configured to execute one of a voltage-applyingprocess for applying a voltage to the piezoelectric body and a detectionprocess for detecting a signal outputted from the piezoelectric body,when displacement of the flexible portion is detected by thedisplacement detecting section.
 6. The biological testing device ofclaim 5, wherein the ultrasonic wave transmitting/receiving part furtherincludes a determining section configured to determine whether an amountof displacement of the flexible portion detected by the displacementdetecting section is within a range of a predetermined threshold value,and the ultrasonic wave transmitting section is configured to executeone of the voltage-applying process and the detection process when thedetermining section has determined that the amount of displacement inthe flexible portion is within the range of the predetermined thresholdvalue.
 7. The biological testing device of claim 1, wherein the devicebody further includes a front panel having at least one of an inputbutton and a display panel configured and arranged to allow a user tooperate the biological testing device.